Design issues for membrane-based, gas phase microchemical systems

[1]  R. Glowinski,et al.  Computing Methods in Applied Sciences and Engineering , 1974 .

[2]  Lanny D. Schmidt,et al.  Kinetics of NH3 oxidation on Pt, Rh, and Pd☆ , 1975 .

[3]  M. Flytzani-Stephanopoulos,et al.  Surface morphology of platinum catalysts , 1977 .

[4]  S. Terry,et al.  A gas chromatographic air analyzer fabricated on a silicon wafer , 1979, IEEE Transactions on Electron Devices.

[5]  H. Lintel,et al.  A piezoelectric micropump based on micromachining of silicon , 1988 .

[6]  Masayoshi Esashi,et al.  Normally closed microvalve and mircopump fabricated on a silicon wafer , 1989 .

[7]  Masayoshi Esashi,et al.  Normally close microvalve and micropump fabricated on a silicon wafer , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.

[8]  Yu-Chong Tai,et al.  Thermophysical properties of low-residual stress, Silicon-rich, LPCVD silicon nitride films , 1990 .

[9]  L. Schmidt,et al.  Modeling catalytic gauze reactors: ammonia oxidation , 1991 .

[10]  Jan H. J. Fluitman,et al.  Micro-liquid flow sensor , 1993 .

[11]  R. S. Benson,et al.  Process miniaturisation : a route to total environmental acceptability ? , 1993 .

[12]  M. Lyubovsky,et al.  Formation of "Metal Wool" Structures and Dynamics of Catalytic Etching of Platinum Surfaces During Ammonia Oxidation , 1994 .

[13]  Costas P. Grigoropoulos,et al.  Thermal conductivity and diffusivity of free‐standing silicon nitride thin films , 1995 .

[14]  W. Ehrfeld,et al.  Sensor Controlled Processes In Chemical Microreactors , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[15]  T. Gerlach,et al.  Pumping gases by a silicon micro pump with dynamic passive valves , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[16]  Michael P. Harold,et al.  Micromachined reactors for catalytic partial oxidation reactions , 1997 .

[17]  G. Stemme,et al.  Thermal characterization of surface-micromachined silicon nitride membranes for thermal infrared detectors , 1997 .

[18]  A new method for measuring thermal conductivity of thin films , 1997 .

[19]  Michael P. Harold,et al.  Simulation of micromachined chemical reactors for heterogeneous partial oxidation reactions , 2000 .