Intelligent simulation-based lot scheduling of photolithography toolsets in a wafer fabrication facility
暂无分享,去创建一个
[1] Averill M. Law. Designing a simulation study: how to conduct a successful simulation study , 2003, WSC '03.
[2] Mansooreh Mollaghasemi,et al. Validation and verification of the simulation model of a photolithography process in semiconductor manufacturing , 1998, 1998 Winter Simulation Conference. Proceedings (Cat. No.98CH36274).
[3] J. P. Ignizio,et al. Optimal maintenance headcount allocation: an application of Chebyshev Goal Programming , 2004 .
[4] Averill M. Law,et al. How to conduct a successful simulation study , 2003, Proceedings of the 2003 Winter Simulation Conference, 2003..
[5] John S. Carson. Introduction to simulation: introduction to modeling and simulation , 2003, WSC '03.
[6] J. Si,et al. Understanding a semiconductor process using a full-scale model , 2002 .
[7] Amr Arisha,et al. Flow Shop Scheduling Problem: a Computational Study , 2002 .
[8] Amr Arisha,et al. Intelligent shop scheduling for semiconductor manufacturing , 2003 .
[9] R. Uzsoy,et al. Cycle-time improvements for photolithography process in semiconductor manufacturing , 2001 .
[10] Amr Arisha,et al. Evaluation of Scheduling Strategies on the Performance of a Flexible Manufacturing Cell:a Simulation Study , 2003 .
[11] John S. Carson. Introduction to modeling and simulation , 2005, Proceedings of the Winter Simulation Conference, 2005..