Nanofabrication using computer-assisted design and automated vector-scanning probe lithography

This work represents our initial effort towards the fabrication of complex nanopatterns with automated scanning probe lithography (SPL). A multi-mode scanning probe microscope is linked with a computer-controlled vector-scan module to allow precise, automated control of the tip motion. The module is interfaced with computer-assisted design (CAD) and VLSI software, and programming capabilities are developed. We also provide a pathway for integration of our apparatus with external instruments. The capability to rapidly produce complicated nanopatterns is demonstrated using AFM fabrication of thiol self-assembled monolayers.

[1]  A. Volodin.  NEW RESULTS IN SCANNING PROBE MICROSCOPY (REVIEW OF MATERIALS OF THE STM'97 INTERNATIONAL CONFERENCE) , 1998 .

[2]  H. Sugimura,et al.  AFM LITHOGRAPHY IN CONSTANT CURRENT MODE , 1997 .

[3]  M. Aono,et al.  Scanning Tunneling Microscope Fabrication of Atomic-Scale Memory on a Silicon Surface , 1994 .

[4]  Haiwon Lee,et al.  Atomic Force Microscope Lithography with Octadecyldimethyl-Methoxysilane Monolayer Resist , 1999 .

[5]  H. Sugimura,et al.  Scanning probe lithography for electrode surface modification , 1999 .

[6]  R. Crooks,et al.  Nanometer-Scale Patterning of Metals by Electrodeposition from an STM Tip in Air , 1998 .

[7]  Y. Oh,et al.  Atomic Force Microscope Based Nanolithography of Self-Assembled Organosilane Monolayer Resists , 1998 .

[8]  Richard M. Crooks,et al.  Scanning Probe Lithography. 1. Scanning Tunneling Microscope Induced Lithography of Self-Assembled n-Alkanethiol Monolayer Resists , 1993 .

[9]  H. Iwasaki,et al.  Fabrication of Nanopit Arrays on Si(111). , 1999 .

[10]  Aristides A. G. Requicha,et al.  Nanoparticle manipulation by mechanical pushing: underlying phenomena and real-time monitoring , 1998 .

[11]  Kazuhiko Matsumoto,et al.  Terabit-per-square-inch data storage with the atomic force microscope , 1999 .

[12]  R. Crooks,et al.  Scanning Probe Lithography. 4. Characterization of Scanning Tunneling Microscope-Induced Patterns in n-Alkanethiol Self-Assembled Monolayers , 1997 .

[14]  B. Klehn,et al.  Nanolithography with an atomic force microscope by means of vector-scan controlled dynamic plowing , 1999 .

[15]  U. Kleineberg,et al.  STM writing of artificial nanostructures in alkanethiol-type self-assembled monolayers , 1999 .

[16]  Calvin F. Quate,et al.  Scanning probes as a lithography tool for nanostructures , 1997 .

[17]  I. Suemune,et al.  Atomic force microscope nanolithography on SiO2/semiconductor surfaces , 1997 .

[18]  Tomonori Ishikawa,et al.  Site-controlled self-organization of individual InAs quantum dots by scanning tunneling probe-assisted nanolithography , 1999 .

[19]  Aristides A. G. Requicha,et al.  Robotic nanomanipulation with a scanning probe microscope in a networked computing environment , 1997 .

[20]  J. Schneir,et al.  Integration of scanning tunneling microscope nanolithography and electronics device processing , 1992 .

[21]  John A. Dagata,et al.  Electron‐beam lithography with the scanning tunneling microscope , 1992 .

[22]  M. Humphry,et al.  Digital scanning probe microscope controller for molecular manipulation applications , 2000 .

[23]  C. Joachim,et al.  Fabrication and AFM characterization of a co-planar tunnel junction with a less than 30 nm interelectrode gap , 1994 .

[24]  M. Fujihira,et al.  Chemical force microscopy of -CH3 and -COOH terminal groups in mixed self-assembled monolayers by pulsed-force-mode atomic force microscopy , 2000 .

[25]  R. Crooks,et al.  Scanning Probe Lithography. 3. Nanometer-Scale Electrochemical Patterning of Au and Organic Resists in the Absence of Intentionally Added Solvents or Electrolytes , 1996 .

[26]  Charles F. Spence,et al.  Digital signal processor control of scanned probe microscopes , 1993 .

[27]  K. Hjort,et al.  The scanning tunneling microscope as a tool for nanolithography: Writing nanostructures on Si (110) in air , 1995 .

[28]  G. Abadal,et al.  Field induced oxidation of silicon by SPM: study of the mechanism at negative sample voltage by STM, ESTM and AFM , 1998 .

[29]  Vittorio Foglietti,et al.  Atomic force microscopy lithography as a nanodevice development technique , 1999 .

[30]  Xu,et al.  "Dip-Pen" nanolithography , 1999, Science.

[31]  J. Lyding.  UHV STM nanofabrication: progress, technology spin-offs, and challenges , 1997, Proc. IEEE.

[33]  T. Hattori,et al.  Modification of Silicon Surface Using Atomic Force Microscope with Conducting Probe , 1993 .

[34]  Gang-yu Liu,et al.  Fabrication of Nanometer Scale Patterns within Self-Assembled Monolayers by Nanografting , 1999 .

[35]  Gang-yu Liu,et al.  Nanometer-scale fabrication by simultaneous nanoshaving and molecular self-assembly , 1997 .

[36]  W. Dressick,et al.  Nanolithography by displacement of catalytic metal clusters using an atomic force microscope tip , 1997 .

[37]  Nabil A. Amro,et al.  Patterning Surfaces Using Tip-Directed Displacement and Self-Assembly , 2000 .

[38]  Hiroshi Masuhara,et al.  Scanning tunneling microscope tip‐induced anodization of titanium: Characterization of the modified surface and application to the metal resist process for nanolithography , 1994 .

[39]  G. Leggett,et al.  Friction and adhesion of mixed self-assembled monolayers studied by chemical force microscopy , 1999 .

[40]  U. Kleineberg,et al.  STM writing of artificial nanostructures in ultrathin PMMA and SAM resists and subsequent pattern transfer in a Mo/Si multilayer by reactive ion etching , 1998 .

[41]  Sam F. Y. Li,et al.  Submicrometer lithography of a silicon substrate by machining of photoresist using atomic force microscopy followed by wet chemical etching , 1997 .

[42]  Ute Drechsler,et al.  The "Millipede"-More than thousand tips for future AFM storage , 2000, IBM J. Res. Dev..

[43]  Hardware for digitally controlled scanned probe microscopes , 1992 .

[44]  Hong,et al.  A nanoplotter with both parallel and serial writing capabilities , 2000, Science.

[45]  Fabrication of metallic nanostructures with an atomic force microscope , 1996 .