The effects of the density profile on the power absorption and the equilibrium density in helicon plasmas

Power absorption profiles are computed using numerical integration for radially non-uniform helicon plasmas with finite axial lengths. As in a uniform plasma, the Trivelpiece–Gould mode dominates the power absorption causing the surface deposition of the rf power. In addition to the surface heating, there is bulk electron heating for non-uniform plasmas, and the portion of this bulk heating increases with the degree of the inhomogeneity. It has been also found that the radial inhomogeneity of the plasma density results in the suppression of the m=−1 mode and reveals the axial resonance condition. Finally, the global power balance is considered to estimate average equilibrium densities, which are found to be in agreement with experimental values.

[1]  Keiji Suzuki,et al.  Hot Spots and Electron Heating Processes in a Helicon-Wave Excited Plasma , 1995 .

[2]  V B Taranov,et al.  Resonance wave discharge and collisional energy absorption in helicon plasma source , 1994 .

[3]  Francis F. Chen,et al.  Helicon waves in a non-uniform plasma , 1994 .

[4]  Boswell,et al.  Ar II laser generated by Landau damping of whistler waves at the lower hybrid frequency. , 1989, Physical review letters.

[5]  Roderick Boswell.  Very efficient plasma generation by whistler waves near the lower hybrid frequency , 1984 .

[6]  Francis F. Chen,et al.  Experiments on helicon plasma sources , 1992 .

[7]  Francis F. Chen,et al.  Downstream physics of the helicon discharge , 1996 .

[8]  J. Scharer,et al.  Modeling of profile effects for inductive helicon plasma sources , 1996 .

[9]  D. Graves,et al.  Two‐dimensional fluid model of high density inductively coupled plasma sources , 1994 .

[10]  D. Arnush,et al.  Axial propagation of helicon waves , 1995 .

[11]  M. Light,et al.  Helicon wave excitation with helical antennas , 1995 .

[12]  Francis F. Chen,et al.  Plasma ionization by helicon waves , 1991 .

[13]  K. P. Shamrai,et al.  Resonances and anti-resonances of a plasma column in a helicon plasma source☆ , 1995 .

[14]  R. Boswell,et al.  The application of the helicon source to plasma processing , 1991 .

[15]  Suwon Cho,et al.  The field and power absorption profiles in helicon plasma resonators , 1996 .

[16]  Helicon wave propagation in the SHEILA heliac , 1995 .

[17]  rf discharge in the fields of plasma resonator eigenmodes , 1994 .

[18]  Michael T. Heath,et al.  Scientific Computing , 2018 .

[19]  G. Borg,et al.  An evaluation of different antenna designs for helicon wave excitation in a cylindrical plasma source , 1996 .

[20]  Tatsuo Shoji,et al.  Plasma production by helicon waves , 1993 .