High-performance meta-devices based on multilayer meta-atoms: interplay between the number of layers and phase coverage.

Transmissive metasurfaces have provided an efficient platform to manipulate electromagnetic (EM) waves, but previously adopted multilayer meta-atoms are too thick and/or the design approach fully relies on brute-force simulations without physical understandings. Here, based on coupled-mode theory (CMT) analyses on multilayer meta-atoms of distinct types, it is found that meta-atoms of a specific type only allows the phase coverage over a particular range, thus suitable for polarization-control applications. However, combinations of meta-atoms with distinct types are necessary for building ultra-thin wavefront-control meta-devices requiring 360° phase coverage. Based on these physical understandings, high-efficiency meta-atoms are designed/fabricated, and used to construct three typical meta-devices, including quarter- and half-wave plates and a beam deflector. Our results elucidate the physics underlying the interplay between thicknesses and performances of transmissive metasurfaces, which can guide the realizations of miniaturized transmissive meta-devices in different frequency domains.

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