Thermal deformation measurement of Al2O3 ceramic substrate based on radial basis function

In this paper, the method of Radial basis function(RBF) to Electronic Speckle Pattern Interferometry (ESPI)information extraction is studied, mainly including: the filtering method based on radial basis function for ESPI fringe patterns with wide density; introducing the radial basis function to interpolate the number of fringe in the fringe skeleton method. Thermal deformation phase measurement of Al2O3 ceramic substrate at the circumstance of thermal load was estimated based on the ESPI. In the experiment, four ESPI fringe patterns at different moment at the beginning of the experiment were captured. The RBF filtering method and the fringe skeleton method with RBF interpolating were used to estimating the thermal deformation phase measurement. The acquiring out-of-plane displacements by our method were in good agreement with the real deformation under the stepped-up thermal load gradually. This measurement can provide assistance for studying the performance of ceramic substrate in the process of laser processing.

[1]  Xiaoyuan He,et al.  Non-destructive strain determination based on phase measurement and radial basis function , 2015 .

[2]  Fang Zhang,et al.  Performance evaluation of partial differential equation models in electronic speckle pattern interferometry and the delta-mollification phase map method. , 2006, Applied optics.

[3]  Xiaoyuan He,et al.  Thermal residual stress evaluation based on phase-shift lateral shearing interferometry , 2018, Optics and Lasers in Engineering.

[4]  Lianxiang Yang,et al.  Digital Shearography for NDT: Phase Measurement Technique and Recent Developments , 2018, Applied Sciences.

[5]  Dongjian Zhou,et al.  Second-order oriented partial-differential equations for denoising in electronic-speckle-pattern interferometry fringes. , 2008, Optics letters.

[6]  Gao Wang,et al.  Application of the radial basis function interpolation to phase extraction from a single electronic speckle pattern interferometric fringe. , 2011, Applied optics.

[7]  Richard K. Beatson,et al.  Reconstruction and representation of 3D objects with radial basis functions , 2001, SIGGRAPH.

[8]  Jesús Villa,et al.  Regularized quadratic cost function for oriented fringe-pattern filtering. , 2009, Optics letters.

[9]  Yanming Quan,et al.  The depth measurement of internal defect based on laser speckle shearing interference , 2017 .

[10]  Chen Tang,et al.  Localized Fourier transform filter for noise removal in electronic speckle pattern interferometry wrapped phase patterns. , 2011, Applied optics.

[11]  B. Fornberg,et al.  Radial basis function interpolation: numerical and analytical developments , 2003 .

[12]  Qian Kemao,et al.  Windowed Fourier transform for fringe pattern analysis. , 2004, Applied optics.

[13]  Chen Tang,et al.  Overview of anisotropic filtering methods based on partial differential equations for electronic speckle pattern interferometry. , 2012, Applied optics.

[14]  Xin Wen,et al.  Non-Contact and Real-Time Measurement of Kolsky Bar with Temporal Speckle Interferometry , 2018 .

[15]  Chen Tang,et al.  Displacement field analysis based on the combination digital speckle correlation method with radial basis function interpolation. , 2010, Applied optics.

[16]  Chen Tang,et al.  Comparison on performance of some representative and recent filtering methods in electronic speckle pattern interferometry , 2012 .