Non-linear hysteresis intelligent compensation process and intelligent compensation system for silicon-scattering pressure sensor

The invention provides a nonlinear hysteretic intelligent compensation method and an intelligent system thereof for a diffusion silicon pressure sensor. A hysteretic inverse operator which is of simple structure and easy realization is introduced by the method. The output of the hysteretic inverse operator is only related with the extreme value of an adjacent preceding input and output. The curve is of synchronous change with the extreme value point of the hysteretic inverse curve of the sensor and is of different amplitudes. The point to point single value of the lifting section of the hysteretic inverse operator is mapped to the expected amplitude by fuzzy modeling. A fuzzy model is established to form a hysteretic mixed model with the hysteretic inverse operator. The non-smooth and nonlinear hysteretic characteristics of the sensor are adapted and compensated. The method effectively improved the measuring accuracy of the diffusion silicon pressure sensor. The intelligent compensation system established according to the method comprises the diffusion silicon pressure sensor and a computer. The computer comprises a filter module and a hysteretic inverse mixed compensation module. The compensation module comprises the hysteretic inverse operator and a T-S fuzzy modeling. An electrical signal which is of the hysteretic characteristics conducted by nonlinear compensation is outputted by the computer. The sensor technology is easy to be developed and applied.