Dynamic annealing in ion implanted SiC: Flux versus temperature dependence

Partial financial support for this work was received from the Swedish Foundation for Strategic Research ~SSF!, the Swedish Foundation for International Cooperation in Research and Higher Education ~STINT!, the Norwegian Research Council ~NFR!, and the Nordic Academy for Education and Research Training ~NorFA!. One of the authors ~J.W.L.! acknowledges the Australian Research Council for funding under the fellowship program.

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