Design and analysis of a spatial 3-DOF micromanipulator for tele-operation

In this paper, we propose and develop a spatial 3-DOF tele-micromanipulator for precise position control of micro-objects. Typical feature of this device is a one-module flexure hinge that consists of a revolute joint and a spherical joint. Based on preliminary kinematic analysis and stiffness modeling of the system, optimal design and actuator sizing for the device are performed. Furthermore, FEM analysis and resonant frequency analysis are executed to validate the results of analytic design process. The designed device was successfully implemented to tele-micromanipulation system.

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