论文信息 - Junction technology outlook for sub-28nm FDSOI CMOS - 字舞流文

Junction technology outlook for sub-28nm FDSOI CMOS

We review in this paper some key enabling process integration modules, the development of which will allow pursuing the trend of energy efficiency improvement in sub-28nm FDSOI technologies.

Laurent Grenouillet | Yves Morand | Maud Vinet | Claire Fenouillet-Beranger | Sylvain Barraud | Perrine Batude | Thomas Ernst | Jean-Michel Hartmann | Louis Hutin | Cyrille Le Royer | Olivier Rozeau | Fabrice Nemouchi | Veronique Carron | Christophe Plantier | J. Hartmann | C. Fenouillet-Béranger | P. Batude | O. Rozeau | M. Vinet | L. Hutin | F. Nemouchi | T. Ernst | S. Barraud | C. Le Royer | V. Carron | Y. Morand | L. Grenouillet | H. Boutry | J. Borrel | Julien Borrel | Herve Boutry | C. Plantier

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