Measurement, certification and use of step-height calibration specimens in optical metrology

Calibration, adjustment and verification of surface topography measuring instruments are important tasks, often facilitated by precision step-height specimens that have been calibrated using traceable metrology such as interferometry. Although standardized procedures for calculating parameters of the step-height are available for line profiling contact stylus systems, there is inconsistent guidance as to how to interpret step height data for 3D, areal surface topography instruments, such as confocal and interference microscopes. Here we provide definitions for the reference and measurement areas of step-height specimens as well as practical measurement protocols for processing the surface topography map.

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