Structural and electrical properties and current–voltage characteristics of nitrogen-doped diamond-like carbon films on Si substrates by plasma-enhanced chemical vapor deposition
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H. Nakazawa | H. Ohashi | Y. Enta | K. Murakami | K. Tokuda | Kazuki Nakamura | Yu Suzuki | M. Tsuchiya | Kohei Magara | T. Takami | H. Ogasawara | S. Ando | Haruka Ogasawara