Predictive Maintenance in Semiconductor Manufacturing Moving to Fab-Wide Solutions

[1]  J. Moyne,et al.  A comparison of data mining methods for yield modeling, chamber matching and virtual metrology applications , 2012, 2012 SEMI Advanced Semiconductor Manufacturing Conference.

[2]  H. Hajj,et al.  Wafer Classification Using Support Vector Machines , 2012, IEEE Transactions on Semiconductor Manufacturing.

[3]  James Moyne,et al.  Big data emergence in semiconductor manufacturing advanced process control , 2015, 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).

[4]  James Moyne,et al.  Chamber matching across multiple dimensions utilizing Predictive Maintenance, Equipment Health Monitoring, Virtual Metrology and Run-To-Run control , 2014, 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014).