Surface-micromachined components for articulated microrobots

A class of articulated micromanipulator robots with multiple degrees of freedom, workspaces on the order of a cubic millimeter, and payloads on the order of a milligram are proposed. Rigid links, mechanical couplings, and large-force, large-displacement micromotors have been created. Hollow triangular beams made from rotated microhinged polysilicon plates with polysilicon locks can withstand axial loads of up to 2.6 gm. Mechanical couplings with sliding mechanisms are used to rotate hinged structures off the substrate. The typical frictional force observed is approximately 2 /spl mu/N. Linear electrostatic stepper motors with an estimated force of 6.5 /spl mu/N at 35 V and a travel of 40 /spl mu/m have also been demonstrated.