论文信息 - Sub‐Microsecond Polarization Switching in (Al,Sc)N Ferroelectric Capacitors Grown on Complementary Metal–Oxide–Semiconductor‐Compatible Aluminum Electrodes - 字舞流文

Sub‐Microsecond Polarization Switching in (Al,Sc)N Ferroelectric Capacitors Grown on Complementary Metal–Oxide–Semiconductor‐Compatible Aluminum Electrodes

R. Olsson | E. Stach | Dixiong Wang | G. Esteves | D. Jariwala | Jeffrey X. Zheng | Pariasadat Musavigharavi | Xiwen Liu | Merrilyn Mercy Adzo Fiagbenu | M. M. A. Fiagbenu