Surface- and bulk- micromachined two-dimensional scanner driven by angular vertical comb actuators
暂无分享,去创建一个
M.C. Wu | H. Toshiyoshi | W. Piyawattanametha | M. Wu | W. Piyawattanametha | H. Toshiyoshi | P. Patterson | D. Hah | D. Hah | P.R. Patterson
[1] D. Kunze,et al. Large deflection micromechanical scanning mirrors for linear scans and pattern generation , 2000, IEEE Journal of Selected Topics in Quantum Electronics.
[2] V. Aksyuk,et al. Wavelength add-drop switching using tilting micromirrors , 1999 .
[3] Aaas News,et al. Book Reviews , 1893, Buffalo Medical and Surgical Journal.
[4] C.H. Mastrangelo,et al. Electrostatic micromirror arrays fabricated with bulk and surface micromachining techniques , 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.
[5] H. Fujita,et al. A 5-volt operated MEMS variable optical attenuator , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).
[6] Hongrui Jiang,et al. Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator , 1999 .
[7] L. J. Hornbeck. Current status of the digital micromirror device (DMD) for projection television applications , 1993, Proceedings of IEEE International Electron Devices Meeting.
[8] Ming C. Wu,et al. A 2D scanner by surface and bulk micromachined vertical comb actuators , 2003, 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682).
[9] TWO-AXIS GIMBALED MICROSCANNER IN DOUBLE SOI LAYERS ACTUATED BY SELF-ALIGNED VERTICAL ELECTROSTATIC COMBDRIVE , 2004 .
[10] V. Milanovic,et al. A high aspect ratio 2D gimbaled microscanner with large static rotation , 2002, IEEE/LEOS International Conference on Optical MEMs.
[11] L. L. Buhl,et al. Wavelength-selective 1x4 switch for 128 WDMchannels at 50 GHz spacing , 2002 .
[12] Hiroshi Toshiyoshi,et al. A surface and bulk micromachined angular vertical combdrive for scanning micromirrors , 2003, OFC 2003 Optical Fiber Communications Conference, 2003..
[13] M.C. Wu,et al. Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors , 2004, IEEE Journal of Selected Topics in Quantum Electronics.
[14] Ming C. Wu,et al. A 2D Scanner by Surface and Bulk Micromachined Angular Vertical Comb Actuators , 2003 .
[15] S. Timoshenko,et al. Theory of Elasticity (3rd ed.) , 1970 .
[16] M. Wu,et al. A scanning micromirror with angular comb drive actuation , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).
[17] C. R. Giles,et al. Wavelength-selective 1/spl times/4 switch for 128 WDM channels at 50 GHz spacing , 2002, Optical Fiber Communication Conference and Exhibit.
[18] S. Timoshenko,et al. Theory of elasticity , 1975 .
[19] Kam Y. Lau,et al. Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning , 1998 .
[20] M.C. Wu,et al. Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors , 2001, IEEE Photonics Technology Letters.
[21] R. L. Edwards,et al. Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysilicon , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.
[22] Hiroshi Toshiyoshi,et al. A MEMS Non-interferometric Differential Confocal Scanning Optical Microscope , 2001 .
[23] Michael Hietschold,et al. Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS) , 1998 .
[24] S. Ueda,et al. A 2-axis comb-driven micromirror array for 3D MEMS switches , 2002, IEEE/LEOS International Conference on Optical MEMs.
[25] Hiroshi Toshiyoshi,et al. Surface-micromachined confocal scanning optical microscope , 2000, CLEO 2000.
[26] V. Milanovic,et al. Monolithic high aspect ratio two-axis optical scanners in SOI , 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.
[27] Huikai Xie,et al. A SCS CMOS micromirror for optical coherence tomographic imaging , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).
[28] Noel C. MacDonald,et al. Integrating SCREAM micromachined devices with integrated circuits , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.
[29] M.C. Wu,et al. Two-dimensional endoscopic MEMS scanner for high resolution optical coherence tomography , 2004, Conference on Lasers and Electro-Optics, 2004. (CLEO)..
[30] J. Fujimoto,et al. High resolution optical imaging and spectroscopy of biological tissues , 2002, Proceedings of the Second Joint 24th Annual Conference and the Annual Fall Meeting of the Biomedical Engineering Society] [Engineering in Medicine and Biology.
[31] G. Kino,et al. Silicon-micromachined scanning confocal optical microscope , 1998 .
[32] Herbert Shea,et al. Drift-Free, 1000 G mechanical shock tolerant single-crystal silicon two-axis MEMS tilting mirrors in a 1000/spl times/1000-port optical crossconnect , 2003, OFC 2003 Optical Fiber Communications Conference, 2003..