Integration of a Cr–N Thin-Film Displacement Sensor into an XY Micro-stage for Closed-Loop Nano-positioning
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Wei Gao | Yuki Shimizu | Eiji Niwa | Yoshihiro Sasaki | Hiraku Matsukuma | Takuma Sugawara | Keisuke Adachi | Y. Shimizu | H. Matsukuma | K. Adachi | Takuma Sugawara | E. Niwa | Yoshihiro Sasaki | W. Gao
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