Microstructure, physical and chemical properties of nanostructured (Ti–Hf–Zr–V–Nb)N coatings under different deposition conditions

Abstract High-entropy alloy and nitride coatings (TiHfZrVNb)N were prepared by the cathodic-arc-vapor-deposition method under various deposition conditions. The composition, crystal structure, strain-stress state, profiles of defects and atoms in-depth and at surfaces of the (TiHfZrVNb)N coatings were characterized by EDS and SEM analysis, X-ray diffraction with “α-sin2ψ” method of measurements and slow positron beam. The oxidation behavior of nitride films after annealing at 600 °C temperature was studied. The results indicate that nitride coatings show the face-centered cubic crystal structure. The redistributions of elements and defects, their arrangement (segregation) due to the thermally stimulated diffusion and termination of the spinodal segregation near the interfaces, around the grains and subgrains were found. The peak hardness and modulus of the nitride films were 44.3 and 384 GPa, respectively. The tribological properties of the (TiHfZrVNb)N coatings against AISI 1045 were evaluated by a ball-on-disc tribometer with a 3.0 N applied load.

[1]  A. D. Pogrebnyak,et al.  Evolution of vacancy defects in the surface layers of a metal irradiated with a pulsed electron beam , 1997 .

[2]  S. Hofmann,et al.  High temperature oxidation behaviour of (Ti1−xCrx)N coatings , 1996 .

[3]  J. Gan,et al.  Thermal Stability and Performance of NbSiTaTiZr High-Entropy Alloy Barrier for Copper Metallization , 2011 .

[4]  Ming-Hua Shiao,et al.  Thermally Stable TiVCrZrHf Nitride Films as Diffusion Barriers in Copper Metallization , 2012 .

[5]  J. Yeh,et al.  Microstructure characterization of AlxCoCrCuFeNi high-entropy alloy system with multiprincipal elements , 2005 .

[6]  J. Schultze,et al.  XPS and Electrochemical Studies of Thin TiN Layers , 1991 .

[7]  T. Shun,et al.  Nanostructured High‐Entropy Alloys with Multiple Principal Elements: Novel Alloy Design Concepts and Outcomes , 2004 .

[8]  Shou-Yi Chang,et al.  Multiprincipal-Element AlCrTaTiZr-Nitride Nanocomposite Film of Extremely High Thermal Stability as Diffusion Barrier for Cu Metallization , 2009 .

[9]  D. Depla,et al.  Influence of particle and energy flux on stress and texture development in magnetron sputtered TiN films , 2013 .

[10]  H. Schaefer,et al.  High-temperature studies of grain boundaries in ultrafine grained alloys by means of positron lifetime , 2000 .

[11]  M. V. Kaverin,et al.  Multicomponent (Ti-Zr-Hf-V-Nb)N Nanostructure Coatings Fabrication, High Hardness and Wear Resistance , 2013 .

[12]  J. Yeh,et al.  Multi-component nitride coatings derived from Ti–Al–Cr–Si–V target in RF magnetron sputter , 2007 .

[13]  A. D. Pogrebnyak,et al.  REVIEWS OF TOPICAL PROBLEMS: Structures and properties of hard and superhard nanocomposite coatings , 2009 .

[14]  S. Liang,et al.  Effect of microstructure on the nanomechanical properties of TiVCrZrAl nitride films deposited by magnetron sputtering , 2011 .

[15]  Chun-Huei Tsau,et al.  Influence of substrate bias, deposition temperature and post-deposition annealing on the structure and properties of multi-principal-component (AlCrMoSiTi)N coatings , 2008 .

[16]  S. Kodambaka,et al.  Pathways of atomistic processes on TiN(001) and (111) surfaces during film growth: An ab initio study , 2003 .

[17]  S. Carvalho,et al.  Microstructure and mechanical properties of nanocomposite (Ti,Si,Al)N coatings , 2001 .

[18]  V. Dolique,et al.  Complex structure/composition relationship in thin films of AlCoCrCuFeNi high entropy alloy , 2009 .

[19]  V. Braic,et al.  Nanostructured multi-element (TiZrNbHfTa)N and (TiZrNbHfTa)C hard coatings , 2012 .

[20]  I. Petrov,et al.  High‐flux low‐energy (≂20 eV) N+2 ion irradiation during TiN deposition by reactive magnetron sputtering: Effects on microstructure and preferred orientation , 1995 .

[21]  J. Yeh,et al.  Structural and mechanical properties of multi-element (AlCrMoTaTiZr)Nx coatings by reactive magnetron sputtering , 2011 .

[22]  M. V. Kaverin,et al.  Analysis of local regions near interfaces in nanostructured multicomponent (Ti-Zr-Hf-V-Nb)N coatings produced by the cathodic-arc-vapor-deposition from an arc of an evaporating cathode , 2013, The Physics of Metals and Metallography.

[23]  P. Zeman,et al.  Hard amorphous nanocomposite coatings with oxidation resistance above 1000°C , 2008 .

[24]  G. Abadias,et al.  In situ stress evolution during magnetron sputtering of transition metal nitride thin films , 2008 .

[25]  Shou-Yi Chang,et al.  Preparation and characterization of AlCrTaTiZr multi-element nitride coatings , 2006 .

[26]  Ivan Petrov,et al.  Microstructure and oxidation-resistance of Ti1 − x − y −zAlxCryYzN layers grown by combined steered-arc/unbalanced-magnetron-sputter deposition , 1997 .

[27]  S. Logothetidis,et al.  Surface kinetics and subplantation phenomena affecting the texture, morphology, stress, and growth evolution of titanium nitride films , 2004 .

[28]  Raymond L. Boxman,et al.  Vacuum arc deposition devices , 2006 .

[29]  S. Vepřek,et al.  Industrial applications of superhard nanocomposite coatings , 2008 .

[30]  J. Musil.  Hard and superhard nanocomposite coatings , 2000 .

[31]  Xi-Yan Zhang,et al.  Thermodynamic analysis of the simple microstructure of AlCrFeNiCu high-entropy alloy with multi-principal elements , 2009 .

[32]  J. Je,et al.  Preferred orientation of TiN films studied by a real time synchrotron x-ray scattering , 1996 .

[33]  Fadei F. Komarov,et al.  Adhesive strength, superhardness, and the phase and elemental compositions of nanostructured coatings based on Ti-Hf-Si-N , 2012 .

[34]  L. Toth.  Transition Metal Carbides and Nitrides , 1971 .

[35]  J. Yeh,et al.  Effect of nitrogen content and substrate bias on mechanical and corrosion properties of high-entropy films (AlCrSiTiZr)100 −xNx , 2012 .

[36]  G. Pharr,et al.  An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments , 1992 .

[37]  J. Yeh,et al.  Wear resistance and high-temperature compression strength of Fcc CuCoNiCrAl0.5Fe alloy with boron addition , 2004 .

[38]  Jung Ho Je,et al.  Effects of strain energy on the preferred orientation of TiN thin films , 1993 .

[39]  I. Petrov,et al.  Polycrystalline TiN films deposited by reactive bias magnetron sputtering: Effects of ion bombardment on resputtering rates, film composition, and microstructure , 1992 .

[40]  G. Abadias.  Stress and preferred orientation in nitride-based PVD coatings , 2008 .

[41]  M. V. Kaverin,et al.  Effect of mass transfer and segregation on the formation of superhard nanostructured Ti-Hf-N(Fe) catings , 2012 .

[42]  P. Patsalas,et al.  Stress, phase stability and oxidation resistance of ternary Ti–Me–N (Me = Zr, Ta) hard coatings , 2013 .

[43]  Yen-Lin Huang,et al.  Effect of nitrogen flow ratios on the structure and mechanical properties of (TiVCrZrY)N coatings prepared by reactive magnetron sputtering , 2010 .

[44]  A. Pogrebnjak,et al.  Application of micro- and nanoprobes to the analysis of small-sized 3D materials, nanosystems, and nanoobjects , 2012 .

[45]  A. D. Korotaev,et al.  Elastic stress state in superhard multielement coatings , 2009 .

[46]  J. Yeh,et al.  Influence of substrate temperature on structure and mechanical, properties of multi-element (AlCrTaTiZr)N coatings , 2007 .

[47]  J. Yeh,et al.  Microstructure and electrochemical properties of high entropy alloys—a comparison with type-304 stainless steel , 2005 .

[48]  J. Schultze,et al.  Corrosion stability of TiN prepared by ion implantation and PVD , 1993 .

[49]  M. Deng,et al.  Effects of substrate temperature on the structure and mechanical properties of (TiVCrZrHf)N coatings , 2011 .

[50]  J. Yeh,et al.  Mechanical and tribological properties of multi-element (AlCrTaTiZr)N coatings , 2008 .

[51]  V. Beresnev,et al.  Effect of the preparation conditions on the phase composition, structure, and mechanical characteristics of vacuum-Arc Zr-Ti-Si-N coatings , 2011 .

[52]  Y. Tse,et al.  Diffraction stress analysis in fiber-textured TiN thin films grown by ion-beam sputtering: Application to (001) and mixed (001)+(111) texture , 2004 .

[53]  Nathan I. Croitoru,et al.  Reactive-sputter-deposited TiN films on glass substrates , 1991 .

[54]  J. Gan,et al.  Effects of nitrogen flow ratio on the structure and properties of reactively sputtered (AlMoNbSiTaTiVZr)Nx coatings , 2008 .

[55]  O. Sobol,et al.  Reproducibility of the single-phase structural state of the multielement high-entropy Ti-V-Zr-Nb-Hf system and related superhard nitrides formed by the vacuum-arc method , 2012 .

[56]  P. Liaw,et al.  Solid‐Solution Phase Formation Rules for Multi‐component Alloys , 2008 .

[57]  Jien-Wei Yeh,et al.  Thermally stable amorphous (AlMoNbSiTaTiVZr)50N50 nitride film as diffusion barrier in copper metallization , 2008 .

[58]  J. Yeh,et al.  Effects of nitrogen content on structure and mechanical properties of multi-element (AlCrNbSiTiV)N coating , 2009 .

[59]  P. Liaw,et al.  In situ X-ray microdiffraction study of deformation-induced phase transformation in 304 austenitic stainless steel , 2014 .