Revelations in the Art of Fringe Counting: The State of the Art in Distance Measuring Interferometry
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[2] F. Demarest,et al. High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics , 1998 .
[3] Charles R. Steinmetz. Displacement Measurement Repeatability In Tens Of Nanometers With Laser Interferometry , 1988, Advanced Lithography.
[4] R. Heilmann,et al. Dimensional metrology for nanometre-scale science and engineering: towards sub-nanometre accurate encoders , 2004 .
[5] Gary E. Sommargren. Linear/Angular Displacement Interferometer For Wafer Stage Metrology , 1989, Advanced Lithography.
[6] Leslie L. Deck. High-performance multi-channel fiber-based absolute distance measuring interferometer system , 2009, NanoScience + Engineering.
[7] Yoshikazu Arai,et al. Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness , 2010 .
[8] Kevin G. Harding,et al. Handbook of Optical Dimensional Metrology , 2013 .
[9] Vivek G. Badami and Peter J. de Groot. Displacement Measuring Interferometry , 2016 .