Design of MEMS-based microwave and millimeterwave switches for high power applications
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Etienne Perret | David Dubuc | Patrick Pons | Robert Plana | Herve Aubert | Katia Grenier | J. W. Tao | J. P. Fradin | B. Ducarouge | F. Flourens | X. Chauffleur
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[2] Gabriel M. Rebeiz,et al. High-Q millimeter-wave MEMS varactors: extended tuning range and discrete-position designs , 2002, 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278).
[3] J. Graffeuil,et al. Bulk Silicon Micro-Machined MEM Switches For Millimeter-Wave Applications , 2001, 2001 31st European Microwave Conference.