Benchmarking of Monolayer and Bilayer Two-Dimensional Transition Metal Dichalcogenide (TMD) Based Logic Circuits and 6T SRAM Cells

We evaluate and benchmark the performance of logic circuits and stability/performance of 6T SRAM cells using monolayer and bilayer TMD devices based on ITRS 2028 (5.9nm) technology node. For the performance benchmarking of logic circuits, the tradeoff between electrostatic integrity (monolayer favored) and carrier mobility (bilayer favored), and the issues regarding the uncertainties in the mobility ratio and source/drain series resistance, the underlap device design, and the off-current spec., etc. are comprehensively addressed. In the evaluation of SRAM cells, the cell immunity to random variations is focused. Besides, the impact of high RSD of TMD materials on RSNM variability is also investigated. The source/drain underlap design is shown to alleviate the larger variability of bilayer SRAM cells. Finally, with superior electrostatics and immunity to random variations, the monolayer TMD devices are favored for low-power logic and SRAM applications; while the bilayer devices, with higher carrier mobility, are more suitable for high-performance logic and SRAM applications.

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