论文信息 - Femtosecond laser and reactive ion etching based treatments for nanoscale surface texturing of porous silicon carbide - 字舞流文

Femtosecond laser and reactive ion etching based treatments for nanoscale surface texturing of porous silicon carbide

D. M. Trucchi | M. Pea | A. Notargiacomo | L. Laghi | L. Di Gaspare | A. Rinaldi | R. Araneo | A. Bellucci | M. Girolami | S. Orlando | M. De Seta | H. M⊘ller | K. Hansen