论文信息 - One-chip quartz crystal oscillator using a direct-bonding technique of quartz crystal onto silicon

One-chip quartz crystal oscillator using a direct-bonding technique of quartz crystal onto silicon

A one-chip quartz crystal oscillator (XO) using a novel fabrication method to bond directly quartz crystal onto silicon (QOS) without any adhesive, is reported together with its fabrication process, microstructure of the bonded interface, and electro-acoustic characteristics

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