터보분자펌프 로터의 형상모델링 기법

A turbomolecular pump (TMP) is one of the most frequently used one to generate and maintain high and clean vacuum in the industry. In this paper, a 3D geometric modeling for the TMP rotor is discussed. For the modeling of the TMP rotors, the most significant part is to determine the geometry of rotor blades in order to achieve the necessary pumping speed and compression ratio. So far many types of TMP rotor blades have been proposed in its cross-sectional shape and twist in the longitudinal direction. We consider three cases among the categories: (1) rectangular cross-section and without longitudinal twist; (2) rectangular cross-section and with longitudinal twist; (3) curved cross-section and without longitudinal twist; and (4) curved cross-section and with longitudinal twist. The 3D modeling was carried out in Pro/ENGINEER and the key geometric modeling method was established for the each cases. In addition, important geometric dimensions for the TMP rotor are parameterized so that design sensitivity analysis and optimization for pumping speed, compression ratio, and structural responses can be performed efficiently.