Design of MEMS PZT circular diaphragm actuators to generate large deflections
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S. Trolier-McKinstry | R.L. Smith | Eunki Hong | S. Trolier-McKinstry | E. Hong | S. Krishnaswamy | C. Freidhoff | S.V. Krishnaswamy | C.B. Freidhoff | R.L. Smith
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