Integrated Electrospray Chip for Mass Spectrometry

We report here a novel micromachined fluid dispensing system for ESI-MS (Electrospray Ionization - Mass Spectrometry) that has integrated electrolysis-based micro pump, micro mixer and ESI nozzle on a single chip. The whole structure is built by multi-layer Parylene surface micromachining technology. Using this system, precise and multi-sample dispensing for ESI-MS can be achieved on a single chip.

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