Ellipsometric topometry for technical surfaces

In our contribution we describe a novel application of reflection ellipsometry to surface measurement. Not only the refractive index of the surface material but also the deterministic surface structure is concluded from the ellipsometric parameters (Delta) , (Psi) , and p. To achieve this, we here proposed two novel procedures: (1) the ellipsometric differential topometry and (2) the ellipsometric reference film method. The required measurement setup is described. To measure the ellipsometric parameters we developed a novel measurement procedure. Results of preliminary experiments are presented.