A Flexure-Based 3-PRPS Parallel Micro-/Nanopositioning System

A six-DOF positioning mechanism was proposed in the paper. The mechanism adopts a 3-PRPS configuration and has three parallel limbs, which are distributed in parallel along the circumference of the output platform. To increase the mechanism output linearity and reduce the resolution requirement on actuators, a lever displacement reduction mechanism was exploited to satisfy the demands. The compliance parameterized model of the mechanism was established by using the compliance matrix method(CMM) and the output compliance of the mechanism was analytically calculated to be 8.479e-08m/N. The established model was verified by the finite element analysis(FEA) of ANSYS software package. The FEA result was 6.965e-08m/N. The CMM and FEA results have a model deviation of 21.74%. The output platform can bear the maximum x-axis load of 600N according to the FEA results. To verify the mechanism performance, a prototype was created and a stroke test experiment was conducted. The results show that the stroke is more than ±40μm × ±40µm × ±30µm × ±200μrad × ±200μrad × ±300μrad. The development micro-/nanopositioning platform is effective and expected to be applied to the six-DOF spatial positioning.

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