论文信息 - Amorphous Si waveguides with high-quality stacked gratings for multi-layer Si optical circuits - 字舞流文

Amorphous Si waveguides with high-quality stacked gratings for multi-layer Si optical circuits

Y. Wada | T. Katsuyama | Y. Sugimoto | H. Tokushige | T. Endo | K. Hiidome | K. Saiki | N. Ikeda | M. Tokuda | H. Takagi | M. Morita | Y. Ito | K. Tsutsui