论文信息 - Effect of the Sapphire-Nitridation Level and Nucleation-Layer Enrichment with Aluminum on the Structural Properties of AlN Layers - 字舞流文

Effect of the Sapphire-Nitridation Level and Nucleation-Layer Enrichment with Aluminum on the Structural Properties of AlN Layers

A. N. Smirnov | V. Davydov | T. Malin | K. Zhuravlev | V. Ratnikov | V. Mansurov | A. S. Kozhuhov | D. Milakhin | Y. Galitsyn