Polymer microresonator strain sensors

A new class of fiber-based polymer microresonator strain sensors is analyzed and demonstrated. The flexible sensors are fabricated using a liftoff process and are based on the distortion of the microring by strain and the subsequent shift of the resonant wavelength. For the demonstration, a controlled strain was achieved by flexing the sensor. The measured sensitivity at 1310 nm, 0.32 /spl times/ 10/sup -3/ nm//spl mu//spl epsiv/, is in good agreement with the predictions.