Micro shell resonator with T-shape masses fabricated by micro blow-torching using whirling platform

This paper proposes and demonstrates a novel process to improve structural symmetry and surface quality of fused silica (FS) micro shell resonator (MSR) with T-shape masses. The whirling platform is presented to improve micro blow-torching for fabricating FS MSR. A sub-nanometer smooth surface quality (0.404 nm Ra) and a high radial symmetry of less than 9μm (about 0.1% relative tolerance) has been obtained, which describes better structural symmetry and surface quality. Experimental results reveal a good frequency symmetry of 0.175% at wineglass modes frequency of 6904.4Hz and 6916.5Hz.

[1]  Xiang Xi,et al.  Design of a Disk Resonator Gyroscope With High Mechanical Sensitivity by Optimizing the Ring Thickness Distribution , 2016, Journal of Microelectromechanical Systems.

[2]  Khalil Najafi,et al.  A high-q all-fused silica solid-stem wineglass hemispherical resonator formed using micro blow torching and welding , 2015, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).

[3]  F. Ayazi,et al.  3-D micromachined hemispherical shell resonators with integrated capacitive transducers , 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).

[4]  A M Shkel,et al.  Microscale Glass-Blown Three-Dimensional Spherical Shell Resonators , 2011, Journal of Microelectromechanical Systems.

[5]  A. Shkel,et al.  MEMS micro-glassblowing paradigm for wafer-level fabrication of fused silica wineglass gyroscopes , 2014 .

[6]  Farrokh Ayazi,et al.  A Polysilicon Microhemispherical Resonating Gyroscope , 2014, Journal of Microelectromechanical Systems.

[7]  Andrei M. Shkel,et al.  High temperature micro-glassblowing process demonstrated on fused quartz and ULE TSG , 2013 .

[8]  E. H. Cook,et al.  High Q diamond hemispherical resonators: fabrication and energy loss mechanisms , 2015 .

[9]  A. Shkel,et al.  Demonstration of 1 Million $Q$ -Factor on Microglassblown Wineglass Resonators With Out-of-Plane Electrostatic Transduction , 2015, Journal of Microelectromechanical Systems.

[10]  K. Najafi,et al.  Fused-Silica Micro Birdbath Resonator Gyroscope ( $\mu$-BRG) , 2014, Journal of Microelectromechanical Systems.

[11]  Khalil Najafi,et al.  3-Dimensional Blow Torch-Molding of Fused Silica Microstructures , 2013, Journal of Microelectromechanical Systems.

[12]  Wei Li,et al.  Single-crystal diamond micro-cupped resonators made by laser ablation , 2016 .

[13]  K. Najafi,et al.  High-Q fused silica birdbath and hemispherical 3-D resonators made by blow torch molding , 2013, 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).