论文信息 - Capacitive MEMS application for high-frequency power sensor - 字舞流文

Capacitive MEMS application for high-frequency power sensor

Remco J. Wiegerink | Javier Sesé | Jakob Flokstra | A. M. Fernandes

[1] Heikki Seppä,et al. Microelectromechanical systems in electrical metrology , 2001, IEEE Trans. Instrum. Meas..

[2] C. Harper. Electronic Packaging and Interconnection Handbook , 2000 .