论文信息 - Experimental and DFT study of nitrogen atoms interactions with SiOCH low-κ films - 字舞流文

Experimental and DFT study of nitrogen atoms interactions with SiOCH low-κ films

M. Baklanov | Y. Mankelevich | S. Zyryanov | D. Lopaev | T. Rakhimova | A. Zotovich | E. Voronina | A. Palov