Silicon-Layer Guided-Mode Resonance Polarizer With 40-nm Bandwidth

Fabrication and characterization of a guided-mode resonance-based polarizer is presented. This polarizer is made by electron-beam patterning a single layer of amorphous silicon on a glass substrate. The fabricated device has high and low transmittance for transverse-electric and transverse-magnetic polarizations, respectively, over a ~ 40-nm wavelength range for normally incident light. Its experimental extinction ratio is ~ 97:1 at a central wavelength of 1510 nm.

[1]  H. Nishihara Optical integrated circuits , 1989 .

[2]  R. Magnusson,et al.  Concept of multiorder multimode resonant optical filters , 2002, IEEE Photonics Technology Letters.

[3]  D. Erni,et al.  Fabrication of a hard mask for InP based photonic crystals: Increasing the plasma-etch selectivity of poly(methyl methacrylate) versus SiO2 and SiNx , 2005 .

[4]  R. Magnusson,et al.  Doubly resonant single-layer bandpass optical filters. , 2004, Optics letters.

[5]  C. David,et al.  Bilayer Al wire-grids as broadband and high-performance polarizers. , 2006, Optics express.

[6]  Y. Fainman,et al.  Design, fabrication, and characterization of form-birefringent multilayer polarizing beam splitter , 1997 .

[7]  H. Tamada,et al.  Al wire-grid polarizer using the s-polarization resonance effect at the 0.8-microm-wavelength band. , 1997, Optics letters.

[8]  Robert Magnusson,et al.  Use of nondegenerate resonant leaky modes to fashion diverse optical spectra. , 2004, Optics express.

[9]  S. S. Wang,et al.  Multilayer waveguide-grating filters. , 1995, Applied optics.

[10]  T. Gaylord,et al.  Analysis and applications of optical diffraction by gratings , 1985, Proceedings of the IEEE.

[11]  R. Magnusson,et al.  Resonant leaky-mode spectral-band engineering and device applications. , 2004, Optics express.

[12]  Ivan Avrutsky,et al.  Reflection of a beam of finite size from a corrugated waveguide , 1989 .

[13]  R. Magnusson,et al.  New principle for optical filters , 1992 .

[14]  H. Macleod,et al.  Thin-Film Optical Filters , 1969 .

[15]  T K Gaylord,et al.  Normal-incidence guided-mode resonant grating filters: design and experimental demonstration. , 1998, Optics letters.