Atomic-scale imaging of asymmetric Lomer dislocation cores at the Ge/Si(001) heterointerface

Lomer edge dislocations formed at Ge/Si(001) hetero-interfaces have been imaged with a 1.25-MeV atomic-resolution electron microscope. The dislocation cores were primarily asymmetrical, and they were located close to the mean position of the interface, which was not structurally abrupt due to Ge–Si interdiffusion at the growth temperature of 550 °C. Structural models of the asymmetric dislocation cores could be derived directly from the experimental micrographs and image simulations were then used to validate the image interpretation.

[1]  David J. Smith,et al.  Nanometer-scale composition measurements of Ge/Si(100) islands , 2003 .

[2]  J. Drucker Self-assembling Ge(Si)/Si(100) quantum dots , 2002 .

[3]  K. Brunner,et al.  Si/Ge nanostructures , 2002 .

[4]  David Smith,et al.  Polarity determination and atomic arrangements at a GaN/SiC interface using high-resolution image matching , 2000 .

[5]  David J. Smith,et al.  Surfactant-mediated growth of Ge/Si(0 0 1) studied by Raman spectroscopy and TEM , 1999 .

[6]  M. Dornheim,et al.  Atomistic Modeling of Misfit Dislocations for Ge/(001)Si and Ge/(111)Si , 1999 .

[7]  M. Kawasaki,et al.  Demonstration of atomic resolution Z-contrast imaging by a JEOL JEM-2010F scanning transmission electron microscope , 1998 .

[8]  A. Cornet,et al.  Atomic core structure of Lomer dislocation at GaAs/(001)Si interface , 1995 .

[9]  Manfred Rühle,et al.  New high-voltage atomic resolution microscope approaching 1 Å point resolution installed in Stuttgart , 1994 .

[10]  R. Sinclair,et al.  Metastable and equilibrium defect structure of II–VI/GaAs interfaces , 1991 .

[11]  R. Tromp,et al.  Microstructure and strain relief of Ge films grown layer by layer on Si(001). , 1990, Physical review. B, Condensed matter.

[12]  J. Narayan,et al.  Atomic structure of 60° and 90° dislocations in Ge/Si systems and critical phenomena , 1989 .

[13]  A. Renault,et al.  Core structure of the Lomer dislocation in germanium and silicon , 1982 .

[14]  J. Hornstra Dislocations in the diamond lattice , 1958 .