论文信息 - Extraordinary synergetic effect of precursors in laser CVD deposition of SiBCN films - 字舞流文

Extraordinary synergetic effect of precursors in laser CVD deposition of SiBCN films

H. Katsui | R. Tu | I. Merenkov | M. Khomyakov | T. Goto | M. Kosinova | V. Sulyaeva | R. Pushkarev