论文信息 - Laser Spike Annealing for Shallow Junctions in Ge CMOS - 字舞流文

Laser Spike Annealing for Shallow Junctions in Ge CMOS

S. Banerjee | A. Dolocan | Y. Wang | E. Tutuc | Taegon Kim | Feng Wen | A. Roy | Xiaoru Wang | W. Hsu