Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation
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Kazuyoshi Takagi | Nobuyuki Yoshikawa | Naofumi Takagi | Akira Fujimaki | Shuichi Nagasawa | Mutsuo Hidaka | Kenji Hinode | Hiroyuki Akaike | Tetsuro Satoh | N. Takagi | S. Nagasawa | K. Takagi | N. Yoshikawa | M. Hidaka | K. Hinode | A. Fujimaki | T. Satoh | H. Akaike
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