Wavelength selective interlayer directionally grating‐coupled InP/InGaAsP waveguide photodetection

We present the first demonstration of interlayer, or vertical, directional grating coupling using a permanently incorporated corrugated layer grating. Based on an InP/InGaAsP antiresonant reflecting optical waveguide (ARROW) geometry grown by chemical beam epitaxy and metalorganic chemical vapor deposition, we have achieved a large mode contradirectional grating‐coupled waveguide photodetector with a spectral response peak 9 A wide. The ‘‘optical bus’’ capabilities of the vertically coupled ARROW structure make this device suitable for optical integration.