论文信息 - Damage and strain in epitaxial GexSi1−x films irradiated with Si - 字舞流文

Damage and strain in epitaxial GexSi1−x films irradiated with Si

Kang L. Wang | M. Nicolet | A. Vantomme | F. Eisen | T. Vreeland | D. Lie | T. Carns | V. Arbet-Engels