Shaping the nanostructures from electromigration-based deposition

Electromigration-based deposition (EMBD) is proposed for the fabrication of three-dimensional (3D) metallic nanostructures. The process is based on nanofluidic mass delivery at the attogram scale from metal-filled carbon nanotubes (m@CNTs) using nanorobotic manipulation inside a transmission electron microscope. By attaching a conductive probe to the sidewall of the CNT, it has been shown that mass flow can be achieved regardless the conductivity of the object surface. Experiments have also shown the influence of heat sinks on the geometries of the deposits from EMBD. By modulating the relative position between the deposit and the heat sinks, it becomes possible to reshape the deposits. As a general-purposed nanofabrication process, EMBD will enable a variety of applications such as nanorobotic arc welding and assembly, nanoelectrodes direct writing, and nanoscale metallurgy.

[1]  Fumihito Arai,et al.  DESTRUCTIVE CONSTRUCTION OF NANOSTRUCTURES WITH CARBON NANOTUBES , 2002 .

[2]  Hideo Namatsu,et al.  Nano-Four-Point Probes on Microcantilever System Fabricated by Focused Ion Beam , 2003 .

[3]  E Olsson,et al.  Nanopipettes for metal transport. , 2004, Physical review letters.

[4]  Li Zhang,et al.  Nanorobotic spot welding: controlled metal deposition with attogram precision from copper-filled carbon nanotubes. , 2007, Nano letters.

[5]  Lixin Dong,et al.  Local control of electric current driven shell etching of multiwalled carbon nanotubes , 2007 .

[6]  Masanori Komuro,et al.  Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition , 2000 .

[7]  X. Tao,et al.  Nanotube Boiler: Attogram Copper Evaporation Driven by Electric Current, Joule Heating, Charge, and Ionization , 2009, IEEE Transactions on Nanotechnology.

[8]  Lixin Dong,et al.  Spheres on pillars: Nanobubbling based on attogram mass delivery from metal-filled nanotubes , 2010, 10th IEEE International Conference on Nanotechnology.

[9]  Jing Zhu,et al.  Self-flow via upwind electromigration of nanoliquid bridge , 2010 .

[10]  T. D. Yuzvinsky,et al.  Nanoscale reversible mass transport for archival memory. , 2009, Nano letters.

[11]  Fumihito Arai,et al.  Electron-beam-induced deposition with carbon nanotube emitters , 2002 .

[12]  Hans W. P. Koops,et al.  Constructive three-dimensional lithography with electron-beam induced deposition for quantum effect devices , 1993 .

[13]  David Keller,et al.  Imaging steep, high structures by scanning force microscopy with electron beam deposited tips , 1992 .

[14]  Antoine Ferreira,et al.  Nanotube fluidic junctions: internanotube attogram mass transport through walls. , 2009, Nano letters.

[15]  Takayuki Hoshino,et al.  Nanomanipulator and actuator fabrication on glass capillary by focused-ion-beam-chemical vapor deposition , 2004 .

[16]  Shengming Zhou,et al.  Thermal CVD synthesis of carbon nanotubes filled with single-crystalline Cu nanoneedles at tips , 2006 .

[17]  Dmitri Golberg,et al.  Stepwise current-driven release of attogram quantities of copper iodide encapsulated in carbon nanotubes. , 2008, Nano letters.

[18]  Kazuo Furuya,et al.  Compound nanostructures formed by metal nanoparticles dispersed on nanodendrites grown on insulator substrates , 2006 .