Introduction to Plasma Sources

The ideal plasma generator would excel in all of the following characteristics, but some compromises are always necessary. Advanced plasma tools are in production that satisfy these criteria quite well. What is important , however, is the combination of the tool and the process. For instance, etching SiO2 requires both a source and a procedure. The commercial product is often not just the tool but the process, including the source, the settings, and the timing developed to perform a given task.