论文信息 - Structural, optoelectronic and mechanical properties of PECVD Si-C-N films: An effect of substrate bias - 字舞流文

Structural, optoelectronic and mechanical properties of PECVD Si-C-N films: An effect of substrate bias

V. Ivashchenko | L. A. Ivashchenko | O. Porada | T. Tomila | A. Kozak | V. S. Manjara | G. Klishevych