Accurate microcrystallography using electron back-scattering patterns

Abstract A method for precise determination of the orientation of mierocrystals is described. Electron back-scattering patterns are observed on a fluorescent screen in a scanning electron microscope, and high precision is obtained by casting geo metrical shadows onto the screen to determine the point from which the back-scattered electrons are emitted. Orientational accuracy around ±0.5° can be routinely obtained. The geometrical constructions used for evaluating the crystal orientation, and the errors in this orientation, are described. Some experimental examples are given.