Fabrication of vertical digital silicon optical micromirrors on suspended electrode for guided-wave optical switching applications
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C. Hibert | P. Renaud | C. Hibert | Y. Burri | R. Guerre | Philippe Renaud | Roland Guerre | Y. Burri | Ph. Flückiger | P. Flückiger
[1] M. Makihara,et al. Strictly non-blocking N/spl times/N thermo-capillarity optical matrix switch using silica-based waveguide , 2000, Optical Fiber Communication Conference. Technical Digest Postconference Edition. Trends in Optics and Photonics Vol.37 (IEEE Cat. No. 00CH37079).
[2] Lih Y. Lin,et al. Micromachined free-space integrated micro-optics , 1995 .
[3] Cheng-Tang Pan. Silicon-based coupling platform for optical fiber switching in free space , 2004 .
[4] P. B. Chu,et al. MEMS: the path to large optical crossconnects , 2002 .
[5] H. Fujita. MEMS/MOEMS application to optical communication , 2001, SPIE MOEMS-MEMS.
[6] R.W. Tkach,et al. On the expandability of free-space micromachined optical cross connects , 2000, Journal of Lightwave Technology.
[7] R. W. Tkach,et al. Free-space micromachined optical switches for optical networking , 1999 .
[8] Hans Peter Herzig,et al. Applications of SOI-based optical MEMS , 2002 .
[9] J L Jackel,et al. Bistable optical switching using electrochemically generated bubbles. , 1990, Optics letters.
[10] Stefan Bengtsson,et al. Plasma assisted room temperature bonding for MST , 2001 .
[11] Clinton Randy Giles,et al. The Lucent LambdaRouter: MEMS technology of the future here today , 2002, IEEE Commun. Mag..
[12] G. Stemme,et al. Low temperature full wafer adhesive bonding , 2001 .
[13] W. Noell,et al. Novel process-insensitive latchable 2 /spl times/ 2 optical cross connector for single- and multimode optical MEMS fiber switches , 2003, 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682).
[14] R.T. Chen,et al. A high-speed low-voltage stress-induced micromachined 2 x 2 optical switch , 1999, IEEE Photonics Technology Letters.
[15] Hiroyuki Fujita,et al. Movable vertical mirror arrays for optical microswitch matrixes and their electromagnetic actuation , 2002 .
[16] N. D. Rooij,et al. Micro-opto-mechanical 2/spl times/2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation , 1999 .
[17] Tatsuya Fukami,et al. Silicon micro optical switching device with an electromagnetically operated cantilever , 2000 .
[18] P. Barth,et al. A compact, scalable cross-connect switch using total internal reflection due to thermally-generated bubbles , 1998, Conference Proceedings. LEOS'98. 11th Annual Meeting. IEEE Lasers and Electro-Optics Society 1998 Annual Meeting (Cat. No.98CH36243).
[19] Yilong Hao,et al. Micromachined optical switch with a vertical SU-8 mirror , 2001, Other Conferences.
[20] Rajiv Ramaswami,et al. MEMS technology for optical networking applications , 2001, IEEE Commun. Mag..
[21] Hiroyuki Fujita,et al. Self-aligned vertical mirror and V-grooves applied to an optical-switch: modeling and optimization of bi-stable operation by electromagnetic actuation , 2001 .
[22] Igal Brener,et al. MOEMS: enabling technologies for large optical cross-connects , 2001, SPIE MOEMS-MEMS.
[23] J. E. Fouquet. Compact optical cross-connect switch based on total internal reflection in a fluid-containing planar lightwave circuit , 2000, Optical Fiber Communication Conference. Technical Digest Postconference Edition. Trends in Optics and Photonics Vol.37 (IEEE Cat. No. 00CH37079).
[24] R. Tkach,et al. Free-space micromachined optical switches with submillisecond switching time for large-scale optical crossconnects , 1998, IEEE Photonics Technology Letters.
[25] Bishop Dj,et al. The rise of optical switching. , 2001 .
[26] Huma Ashraf,et al. Advanced silicon etching using high-density plasmas , 1995, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.
[27] M. Makihara,et al. Self-holding optical waveguide switch controlled by micromechanisms , 1995, 1995 Proceedings. 45th Electronic Components and Technology Conference.
[28] K. Falta,et al. Digital MEMS for optical switching , 2002, IEEE Commun. Mag..
[29] A. Takahashi,et al. Development of 4/spl times/4 MEMS optical switch , 2000, 2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399).
[30] C. R. Giles,et al. Beam-steering micromirrors for large optical cross-connects , 2003 .
[31] M. Gretillat,et al. Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications , 1997 .
[32] S. Venkatesh,et al. Compact, scalable fiber optic cross-connect switches , 1999, 1999 Digest of the LEOS Summer Topical Meetings: Nanostructures and Quantum Dots/WDM Components/VCSELs and Microcavaties/RF Photonics for CATV and HFC Systems (Cat. No.99TH8455).
[33] A highly dense MEMS optical switch array integrated with planar lightwave circuit , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).
[34] M. Makihara,et al. Improvement of switching time in a thermocapillarity optical switch , 2001, OFC 2001. Optical Fiber Communication Conference and Exhibit. Technical Digest Postconference Edition (IEEE Cat. 01CH37171).
[35] J. A. Walker,et al. Network control and management challenges in opaque networks utilizing transparent optical switches , 2004, IEEE Communications Magazine.
[36] M. Wu,et al. Free-space fiber-optic switches based on MEMS vertical torsion mirrors , 1999, Journal of Lightwave Technology.
[37] W. Noell,et al. 4X4 matrix switch based on MEMS switches and integrated waveguides , 2001 .
[38] Peter Enoksson,et al. Low temperature full wafer adhesive bonding of structured wafers , 2000 .
[39] Peter De Dobbelaere,et al. Advances in integrated 2D MEMS-based solutions for optical network applications , 2003, IEEE Commun. Mag..
[40] C. Hibert,et al. DEEP ANISOTROPIC ETCHING OF SILICON USING LOW PRESSURE HIGH DENSITY PLASMA. PRESENTATION OF COMPLEMENTARY TECHNIQUES AND THEIR APPLICATIONS IN MICROTECHNOLOGY. , 2001 .
[41] Ai Qun Liu,et al. Optical Switch Using Draw-Bridge Micromirror for Large Array Crossonnects , 2001 .
[42] F. Shimokawa,et al. Multi-element thermo-capillary optical switch and sub-nanoliter oil injection for its fabrication , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).
[43] H. Fujita,et al. Self-aligned micromachining process for large-scale, free-space optical cross-connects , 2000, Journal of Lightwave Technology.
[44] G. Papadimitriou,et al. Optical switching: switch fabrics, techniques, and architectures , 2003 .
[45] M. Nishimura,et al. Micromachined curling optical switch array for PLC-based, integrated programmable add/drop multiplexer , 2001, OFC 2001. Optical Fiber Communication Conference and Exhibit. Technical Digest Postconference Edition (IEEE Cat. 01CH37171).
[46] Lih Y. Lin,et al. Opportunities and challenges for MEMS in lightwave communications , 2002 .
[47] Ryutaro Maeda,et al. Low-temperature direct bonding of silicon and silicon dioxide by the surface activation method , 1998 .
[48] C. Hibert,et al. Silicon sacrificial layer dry etching (SSLDE) for free-standing RF MEMS architectures , 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.
[49] James A. Walker,et al. The future of MEMS in telecommunications networks , 2000 .
[50] Makoto Sato. Electrocapillarity optical switch , 1994 .
[51] H. Fujita,et al. An out-of-plane polysilicon actuator with a smooth vertical mirror for optical fiber switch application , 1998, 1998 IEEE/LEOS Summer Topical Meeting. Digest. Broadband Optical Networks and Technologies: An Emerging Reality. Optical MEMS. Smart Pixels. Organic Optics and Optoelectronics (Cat. No.98TH8369).
[52] Ming C. Wu,et al. Micromachining for optical and optoelectronic systems , 1997, Proc. IEEE.
[53] Khalil Najafi,et al. 3D MEMS Fabrication Using Low-Temperature Wafer Bonding With Benzocyclobutene (BCB) , 2001 .
[54] Hsiharng Yang,et al. A low-temperature wafer bonding technique using patternable materials , 2002 .
[55] Ai Qun Liu,et al. Advanced fiber optical switches using deep RIE (DRIE) fabrication , 2003 .
[56] J. Margail,et al. Electrostatically actuated micro-fluidic optical cross-connect switch , 2003, 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682).
[57] M. Makihara,et al. Micromechanical optical switches based on thermocapillary integrated in waveguide substrate , 1999 .
[58] Carlos H. Mastrangelo,et al. A two-dimensional optical cross-connect with integrated waveguides and surface micromachined crossbar switches , 2004 .
[59] Peter Enoksson,et al. A method to maintain wafer alignment precision during adhesive wafer bonding , 2003 .
[60] S. Bhansali,et al. A low-temperature bonding technique using spin-on fluorocarbon polymers to assemble microsystems , 2002 .
[61] Ming C. Wu. Surface-micromachined photonic integrated circuits , 2000, 2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399).
[62] Stella W. Pang,et al. High-aspect-ratio Si vertical micromirror arrays for optical switching , 1998 .