A submicron accuracy magnetic levitation micromachine with endpoint friction

Abstract This paper describes the unique design, fabrication and control of a one-dimensional magnetic levitation micromachine with endpoint friction. The flat manipulator, which is driven by six air-core solenoids fixed in the workspace, supports three rare earth permanent magnets in the vertices of its equilateral triangular structure. The manipulator moves from one position to another by making contact with a solid surface under the solenoids after every step, but it does not contact the surface during a lateral step motion. Noncontact measurements of the manipulator movement were made using LED-phototransistor pairs. The 0.21 g manipulator was controlled with 0.5 μm position accuracy over a 100 μm range with a very simple monitored open-loop control strategy. The accuracy and motion range can be improved with large-range high-resolution linear optical sensors.

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