Polymer based micro-reactors.

In this paper, we describe the fabrication technologies necessary for the production of polymer-based micro-fluidic devices. These technologies include hot embossing as a micro-structuring method as well as so-called back-end processes to complete the micro-devices. Applications such as capillary electrophoresis, micro-mixers and nanowell plates are presented.

[1]  S. Soper,et al.  Microcapillary electrophoresis devices fabricated using polymeric substrates and X‐ray lithography , 1998 .

[2]  W. Ehrfeld,et al.  Three-dimensional microfabrication using synchrotron radiation , 1991 .

[3]  R. McCormick,et al.  Microchannel electrophoretic separations of DNA in injection-molded plastic substrates. , 1997, Analytical chemistry.

[4]  A. Manz,et al.  Glass chips for high-speed capillary electrophoresis separations with submicrometer plate heights , 1993 .

[5]  D. J. Harrison,et al.  Micromachining of capillary electrophoresis injectors and separators on glass chips and evaluation of flow at capillary intersections , 1994 .

[6]  Sequential electrospray analysis using sharp-tip channels fabricated on a plastic chip , 2001 .

[7]  Stephen C. Jacobson,et al.  Open channel electrochromatography on a microchip , 1994 .

[8]  S. Jacobson,et al.  Microchip electrophoresis with sample stacking , 1995, Electrophoresis.

[9]  Y. Baba.  Nanochip Technology for Single DNA Molecule Analysis and Human Genomic Polymorphism Analysis , 2000 .

[10]  H. Becker,et al.  Silicon as tool material for polymer hot embossing , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[11]  Holger Becker,et al.  Polymer nanowell plates with variable well slope angles , 2000 .

[12]  J. Ramsey,et al.  Generating electrospray from microchip devices using electroosmotic pumping. , 1997, Analytical chemistry.

[13]  Xu,et al.  Room-temperature imprinting method for plastic microchannel fabrication , 2000, Analytical chemistry.

[14]  L. Locascio,et al.  Measurement of electroosmotic flow in plastic imprinted microfluid devices and the effect of protein adsorption on flow rate. , 1999, Journal of chromatography. A.

[15]  M. A. Northrup,et al.  Functional integration of PCR amplification and capillary electrophoresis in a microfabricated DNA analysis device. , 1996, Analytical chemistry.

[16]  M. Morris,et al.  Effects of alkaline hydrolysis and dynamic coating on the electroosmotic flow in polymeric microfabricated channels. , 2000, Analytical chemistry.

[17]  S A Soper,et al.  Interfacing a polymer-based micromachined device to a nanoelectrospray ionization Fourier transform ion cyclotron resonance mass spectrometer. , 2001, Analytical chemistry.

[18]  R. G. Christensen,et al.  Fabrication of plastic microfluid channels by imprinting methods. , 1997, Analytical chemistry.

[19]  D. Chen,et al.  Palladium film decoupler for amperometric detection in electrophoresis chips. , 2001, Analytical chemistry.

[20]  D. J. Harrison,et al.  Electrokinetic control of fluid flow in native poly(dimethylsiloxane) capillary electrophoresis devices , 2000, Electrophoresis.

[21]  J. Michael Ramsey,et al.  Fused Quartz Substrates for Microchip Electrophoresis , 1995 .

[22]  Gwo-Bin Lee,et al.  Microfabricated plastic chips by hot embossing methods and their applications for DNA separation and detection , 2000, SPIE MOEMS-MEMS.

[23]  J. Rossier,et al.  UV Laser Machined Polymer Substrates for the Development of Microdiagnostic Systems. , 1997, Analytical chemistry.

[24]  S. Terry,et al.  A gas chromatographic air analyzer fabricated on a silicon wafer , 1979, IEEE Transactions on Electron Devices.

[25]  Miko Elwenspoek,et al.  DEEMO: a new technology for the fabrication of microstructures , 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.

[26]  Bill B. Elmore,et al.  Enzyme catalyzed biochemical production in a polydimethylsiloxane microreactor , 2000, SPIE MOEMS-MEMS.

[27]  Theresa B. Taylor,et al.  Micro-Genetic Analysis Systems , 1998 .

[28]  Peter Vettiger,et al.  High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS , 1998 .

[29]  R. Hergenröder,et al.  Capillary Electrophoresis with Direct and Contactless Conductivity Detection on a Polymer Microchip , 2000 .

[30]  H. Becker,et al.  Polymer hot embossing with silicon master structures , 1999 .

[31]  D. J. Harrison,et al.  Planar chips technology for miniaturization and integration of separation techniques into monitoring systems. Capillary electrophoresis on a chip , 1992 .

[32]  Jens Anders Branebjerg,et al.  Microfluidics-a review , 1993 .

[33]  N. Goddard,et al.  Isotachophoresis on Planar Polymeric Substrates , 1998 .

[34]  Peter Dannberg,et al.  Microfluidic Manifolds by Polymer Hot Embossing for μ-Tas Applications , 1998 .

[35]  Shu-Hui Chen,et al.  Analysis of DNA fragments by microchip electrophoresis fabricated on poly(methyl methacrylate) substrates using a wire‐imprinting method , 2000, Electrophoresis.

[36]  A. Manz,et al.  Microstructure for efficient continuous flow mixing , 1999 .

[37]  Ray K. Brown,et al.  Field Strnegth changes during isoelectric focusing , 1980 .

[38]  K. Hesch,et al.  Combination of excimer laser micromachining and replication processes suited for large scale production , 1995 .

[39]  C. Effenhauser,et al.  Integrated capillary electrophoresis on flexible silicone microdevices:  analysis of DNA restriction fragments and detection of single DNA molecules on microchips. , 1997, Analytical chemistry.

[40]  P. Zavracky,et al.  Multichannel microchip electrospray mass spectrometry. , 1997, Analytical chemistry.

[41]  A. Manz,et al.  Miniaturized total chemical analysis systems: A novel concept for chemical sensing , 1990 .

[42]  M. Gaitan,et al.  Plastic Microfluid Devices for Clinical Measurements , 1998 .

[43]  D. J. Harrison,et al.  Micromachining a Miniaturized Capillary Electrophoresis-Based Chemical Analysis System on a Chip , 1993, Science.

[44]  A Manz,et al.  Developments in technology and applications of microsystems. , 1997, Current opinion in chemical biology.

[45]  A Manz,et al.  Chemical amplification: continuous-flow PCR on a chip. , 1998, Science.

[46]  J. Michael Ramsey,et al.  Precolumn Reactions with Electrophoretic Analysis Integrated on a Microchip , 1994 .

[47]  G. Whitesides,et al.  Fabricating large arrays of microwells with arbitrary dimensions and filling them using discontinuous dewetting. , 1998, Analytical chemistry.

[48]  Holger Becker,et al.  Integrated Capillary Electrophoresis for Chemical Analysis , 1998 .

[49]  G. Whitesides,et al.  Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane). , 1998, Analytical chemistry.