论文信息 - Printed circuit board integrated fluxgate sensor

Printed circuit board integrated fluxgate sensor

We have developed a cheap and simple trilayer printed circuit board (PCB)-based technology, adapted for the fabrication of fluxgate magnetic sensors. The two outer layers of the PCB stack comprise the electrical windings of the fluxgate, while the inner layer is made of patterned amorphous magnetic core with extremely high relative magnetic permeability (µr100,000). The output voltage and the sensitivity of the fluxgate devices have been studied as a function of the external field and of the geometry of the magnetic core. We have found a relatively high sensitivity of 18 V/T at an excitation current frequency of 10 kHz. The results obtained clearly show the potential of this miniaturised fluxgate device for application as a magnetic field sensor. Keywords: Fluxgate sensor; Sensitivity; High permeability; Compass; Vitrovac®; Printed circuit board (PCB)

[1] Thomas Seitz. Fluxgate sensor in planar microtechnology , 1990 .

[2] Shoji Kawahito,et al. High-resolution micro-fluxgate sensing elements using closely coupled coil structures , 1996 .

[3] R. Jahne,et al. A miniaturized magnetic-field sensor system consisting of a planar fluxgate sensor and a CMOS readout circuitry , 1996 .

[4] F. Primdahl. The fluxgate magnetometer , 1979 .

[5] W. Budde,et al. A Miniaturized Magnetic Field Sensor System Consisting Of A Planar Fluxgate Sensor And A Cmos Readout Circuitry , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[6] Martin A. M. Gijs,et al. New hybrid technology for planar fluxgate sensor fabrication , 1999 .

[7] Shoji Kawahito,et al. A fluxgate magnetic sensor with micro-solenoids and electroplated permalloy cores , 1994 .

[8] Shoji Kawahito,et al. An integrated micro fluxgate magnetic sensor , 1996 .