Nanoscale Optical Dielectric Rod Antenna for On-Chip Interconnecting Networks

A nanoscale on-chip optical dielectric rod antenna is demonstrated in this paper. The antenna is designed and fabricated on a 200-mm silicon-on-insulator platform, using IMEC 193-nm-deep UV lithography. A 500-nm-thick polymer layer is designed and deposited to act as an asymmetric slab waveguide, confining the radiated wave within the layer. Full-wave analysis predicts antenna return loss above 25 dB, and end-fire gain greater than 9 dBi from 172 to 222 THz. Six antenna pairs with 1-, 3-, 5-, 7-, 12-, and 17- μm separations are fabricated. Corresponding transmissions are measured from 190 to 200 THz. Two on-chip optical signal hubs composed of 16 and 32 antennas designed for core-to-core interconnection for the next-generation multicore microprocessors are also demonstrated. Good agreement between the modeling and measurement is obtained.

[1]  Zhi Ming Chen,et al.  Inter-Chip Wireless Communication Channel: Measurement, Characterization, and Modeling , 2007, IEEE Transactions on Antennas and Propagation.

[2]  R. D. Pollard,et al.  Micromachined waveguide antennas for 1.6 THz , 2006 .

[3]  Y. Vlasov,et al.  Losses in single-mode silicon-on-insulator strip waveguides and bends. , 2004, Optics express.

[4]  Dejan S. Filipovic,et al.  Optical dielectric rod antenna for on-chip communications , 2010, 2010 IEEE Antennas and Propagation Society International Symposium.

[5]  Yue Ping Zhang,et al.  Performance of Intra-Chip Wireless Interconnect Using On-Chip Antennas and UWB Radios , 2009, IEEE Transactions on Antennas and Propagation.

[6]  Raymond G. Beausoleil,et al.  Nanoelectronic and Nanophotonic Interconnect , 2008, Proceedings of the IEEE.

[7]  A. Sugavanam,et al.  On-chip antennas in silicon ICs and their application , 2005, IEEE Transactions on Electron Devices.

[8]  Peter Russer,et al.  Integrated on-chip antennas using CMOS circuit ground planes , 2010, 2010 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF).

[9]  M. J. Adams.  An introduction to optical waveguides , 1981 .

[10]  William J. Dally,et al.  Research Challenges for On-Chip Interconnection Networks , 2007, IEEE Micro.

[11]  Dieter W. Pohl,et al.  Bow-tie optical antenna probes for single-emitter scanning near-field optical microscopy , 2007 .

[12]  D. Hall,et al.  An introduction to optical waveguides , 1982, Proceedings of the IEEE.

[13]  Zheng Li,et al.  On-Chip Wireless Optical Broadcast Interconnection Network , 2010, Journal of Lightwave Technology.

[14]  R. Baets,et al.  Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides , 2006 .

[15]  Li Shang,et al.  Global On-Chip Coordination at Light Speed , 2010, IEEE Design & Test of Computers.

[16]  Peter Russer,et al.  Integrated on-chip antennas using CMOS ground planes , 2010 .

[17]  Nanfang Yu,et al.  Plasmonic Quantum Cascade Laser Antenna , 2007, 2007 Conference on Lasers and Electro-Optics (CLEO).

[18]  M. Siegel,et al.  Terahertz Performance of Integrated Lens Antennas With a Hot-Electron Bolometer , 2007, IEEE Transactions on Microwave Theory and Techniques.